This paper studies the innovation driving force of servitization in manufacturing industry on firms' internationalization based on a theoretical perspect，and utilizes hand-matched data of Chinese listed manufacturing companies from 2007 to 2013. The results show that servitization of manufacturing industry improves extensive and intensive margins of firms' OFDI. Servitization of manufacturing industry brings positive influences on dual margins of OFDI by enhancing innovation capacity in intermediate good sectors to improve productivity. In addition，“going global” brings market-seeking,efficiency-seeking，and technology-seeking motivation to the industry．Knowledge-intensive also nonstate-owned enterprises adopt professional sci-tech services to push themselves “going global”．We suggest that the supply-side structural reform in China should focus on advancing the servitization process of manufacturing industry to strengthen firms' competitiveness，and ultimately facilitating the global of internationalization